High vacuum pump oil

HIGH-PERFORMANCE OILS THAT CREATE HIGH QUALITY VACUUMS

NEOVAC is well-known as a synonym for high quality vacuum pump oil. We have received endorsements of NEOVAC as the oil used by many vacuum pump manufacturers due to the high level of trust placed in NEOVAC's performance. NEOVAC is used in vacuum equipment in applications such as semiconductors, silicon wafers, vacuum deposition, heat treatment, and packaging and contributes to productivity improvements.

 
 
Counterfeit Warning- High Vacuum Pump Oil【ネオバック/NEOVAC】

Petroleum-based rotary pump oil

Rotary pump vacuum oil is used with the purposes of lubrication and the preservation of airtight seals. It has a low steam pressure, suitable viscosity, and is difficult to emulsify (it has anti-emulsification properties). In other words, it easily separates from water and removes water.

Product List

NEOVAC

Product No. kinematic viscosity
mm2/s
(40℃)
Flash point ℃ merit & use Color
(ASTM)
Vapor pressure
Pa(Torr) (50℃)
Product Information
MR-100 44.6 230 Standard for small pump. L0.5 1.3X10-2 or less (1X10-4) リンク
MR-200 71 256 Standard for ratary pump. L0.5 1.3X10-3 or less (1X10-5) リンク
MR-250 105 270 Standard for large pump. 1 1.3X10-3 or less (1X10-5) リンク
ST-200 73.5 252 Improved sludge dispersion, heat and oxidation resistance. (Moisture suction is not supported) L2.5 1.3X10-2 or less (1X10-4) リンク
MR-200A 71 252 Improved heat and oxidation. Moisture suction is supported. L0.5 1.3X10-3 or less (1X10-5) リンク
MR-250A 105 270 Improved heat and oxidation. Moisture suction is supported. For large pump. L1.5 1.3X10-3 or less (1X10-5) リンク

Synthetic rotary pump oil

These products have heat resistance and oxidation resistance that exceed those of petroleum rotary pump oils. These products are well suited to special applications in harsh usage environments such as the electronics industry, the physics and chemistry equipment industry, and the atomic energy industry.

Product List

NEOVAC

Product No. kinematic viscosity
mm2/s
(40℃)
Flash point ℃ merit & use Color
(ASTM)
Vapor pressure
Pa(Torr) (50℃)
Product Information
SO-M 63.7 254 Excellent heat and oxidation resistance. L0.5 4X10-4 or less (3X10-6) リンク
SO-H 95 285 High viscosity than SO-M. L0.5 4X10-5 or less (3X10-7) リンク
SA-L 30 240 Low viscosity than SA-M. L0.5 4X10-4 or less (3X10-6) リンク
SA-M 65 260 Improved oxidation stability of SO-M. L1.0 4X10-4 or less (3X10-6) リンク
SA-H 95 285 Improved oxidation stability of SO-H. L1.0 4X10-5 or less (3X10-7) リンク

Special type rotary pump oil

Even if microscopic powder or reaction products are mixed into these oils, the increase in oil viscosity can be controlled, which makes it possible to reduce the frequency of oil changes. These are special vacuum pump oils that conform to semiconductor manufacturing processes.

Product List

NEOVAC

Product No. kinematic viscosity
mm2/s
(40℃)
Flash point ℃ merit & use Color
(ASTM)
Vapor pressure
Pa(Torr) (50℃)
Product Information
DR-M 68.3 234 For vacuum CVD. Excellent inhibitory effect of thickning. L4.0 1.3X10-3 or less (1X10-5) リンク
SA 38.2 250 For environmental measurement equipment. Excellent heat and oxidation resistance. 3.5 6.5X10-2 or less (5X10-4)

Oil diffusion pump oil

Diffusion pump vacuum oil is sprayed either as molecules or as a steam and is used to obtain a vacuum state. It is necessary for these oils to be chemically stable such as by having low steam pressures, by not being transformed due to heat (heat resistance), and by not reacting easily with oxygen (oxidation resistance).

Product List

NEOVAC

Product No. kinematic viscosity
mm2/s
(40℃)
mean
molecular
weight
Flash point ℃ merit & use Vapor pressure
Pa(Torr) (25℃)
Ulrimate pressure Product Information
SX 約394 235 For surface treatment equipment. (vapor deposition, sputter, heat treatment) 7X10-6 or less (5X10-8) リンク
SY 約422 250 For surface treatment equipment. (vapor deposition, sputter, heat treatment) 1X10-6 or less (1X10-8) リンク

MORESCO-EXCELLOL

Product No. kinematic viscosity
mm2/s
(40℃)
mean
molecular
weight
Flash point ℃ merit & use Vapor pressure
Pa(Torr) (25℃)
Ulrimate pressure Product Information
54 約446 300 For precision analysis equipment. (electron microscopy, mass spectrometer) 7X10-9 or less (5X10-11)

Booster ejector pump oil

Booster ejector pumps, like oil diffusion pumps, are a type of steam spray pump. They are used to spray oil as a steam. These oils have low steam pressures and fast exhaust velocities. Vacuum oils with highly stable heat resistance and oxidation resistance are required.

Product List

NEOVAC

Product No. kinematic viscosity
mm2/s
(40℃)
mean
molecular
weight
Flash point ℃ merit & use Vapor pressure
Pa(Torr) (25℃)
Ulrimate pressure Product Information
DB-12 24 340~350 210 For surface treatment equipment. (vapor deposition, sputter) 3.5X10-3 or less (2.7X10-5) リンク
ME-250 14 260~270 188 For surface treatment equipment. (vapor deposition, sputter, heat treatment) 1.3X10-2 or less (1X10-4) リンク

Mechanical booster pump oil

This pump increases the flow speed in the same manner that a turbo charger attached to a vehicle's engine works. Mechanical booster pump vacuum oil is used on bearings to lubricate them and make them airtight. It is necessary for these oils to be chemically stable such as by having low steam pressures, by having excellent lubricating properties, by having heat resistance, and by having oxidation resistance.

Product List

NEOVAC

Product No. kinematic viscosity
mm2/s
(40℃)
Flash point ℃ merit & use Color
(ASTM)
Vapor pressure
Pa(Torr) (50℃)
Product Information
EP-83 83 250 For gear lubrication of a mechanical booster pump. L1.0 1.3X10-3 or less (1X10-5) -

Center valve oil

The center valve is the rotating part of vacuum tube manufacturing equipment. Center valve oil is used on the sliding surfaces to lubricate them and make them airtight. It is necessary for these oils to be chemically stable such as by having low steam pressures, by having excellent lubricating properties, by having heat resistance, and by having oxidation resistance.

Product List

NEOVAC

Product No. kinematic viscosity
mm2/s
(40℃)
mean
molecular
weight
Flash point ℃ merit & use Vapor pressure
Pa(Torr) (25℃)
Ulrimate pressure Product Information
MC-400 156.6 290 For center valve lubrication of fluorescent and bulb manufacturing equipmanet. 1.3X10-4 or less (1X10-6) リンク
MC-600 256.2 298 For center valve lubrication of fluorescent and bulb manufacturing equipmanet. 1.3X10-4 or less (1X10-6) リンク
MC-1000 411 308 For center valve lubrication of fluorescent and bulb manufacturing equipmanet. 1.3X10-4 or less (1X10-6) リンク

Vacuum grease

This product provides excellent properties as a vacuum seal and lubricant that has a low steam pressure and a wide usage temperature range.

Product List

NEOVAC

Product No. Appearance Consistency
(25℃)
merit & use Operational temperature Vapor pressure
Pa(Torr) (25℃)
Product Information
GREASE Semi transparent white grease 250 Sealing grease of vacuum equipment. 25~100℃ 1.0X10-3 or less (1X10-5)