High quality vacuum pump oil Selection Guide

TypeEnvironmentUseProduct name
Rotary pump For general use Standard NEOVAC MR-100 MR-200 MR-250
For general use(without moisture suction) Sludge dispersibility/Heat resistance NEOVAC ST-200
For general use(with moisture suction) Heat resistance/Oxidation stability NEOVAC MR-200A 250A
High temperature/active gas suction Standard NEOVAC SO-M SO-H
High temperature/active gas suction Heat resistance/Oxidation stability NEOVAC SA-L SA-M SA-H
Fine powder or active gas suction pressure reducing CVD NEOVAC DR-M
Air pollution gas suction For environment measurement NEOVAC SA
Diffusion pumpUlrimate pressure 
7X10-6Pa or less NEOVAC SX
1X10-6Pa or less NEOVAC SY
7X10-9Pa or less MORESCO EXCELLOL 54
Booster ejector pump oilVapor pressure 
1.3X10-2Pa or less NEOVAC ME-250
6.7X10-4Pa or less NEOVAC DB-12
Mechanical booster pump oil   NEOVAC EP-83
Center valveViscosity 40℃ 
156.6mm2/S NEOVAC MC-400
256.2mm2/S NEOVAC MC-600
411mm2/S  NEOVAC MC-1000